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Method of correcting rotationally asymmetrical imaging errors and assembly having optical elements and a temperature adjusting device

机译：校正旋转不对称成像误差的方法以及具有光学元件和温度调节装置的组件

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摘要

The present invention is for example an optical element , in particular a lens (1) and the objective lens (3) having a relates to a method for correcting the non-rotational symmetry of the error in the same part group , the optical element (1) from one or more of the plurality of Peltier elements distributed over the circumference of the element (peltier) - element 6 is placed , the device can be triggered by electrical differently to affect the temperature distribution in the optical element (1) . The Peltier - element is made of 6 and the optical element (1) are respectively the thermal conductivity between the coupling part (4 or 10) . The present invention also provides an optical element , in particular a lens (1) and the Peltier - relates to an objective lens having an element (6)

机译：本发明例如是一种光学元件，特别是一种透镜（1）和物镜（3），其涉及一种用于校正同一零件组中的误差的非旋转对称性的方法，该光学元件（ 1）从分布在元件（珀耳帖）元件6的圆周上的多个珀耳帖元件中的一个或多个放置，可以通过电学方式以不同的方式触发装置，以影响光学元件（1）中的温度分布。珀尔帖元件由6制成，光学元件（1）分别是耦合部分（4或10）之间的热导率。本发明还提供一种光学元件，特别是透镜（1），并且珀尔帖涉及一种具有元件（6）的物镜。

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公开/公告号KR100579880B1

专利类型
公开/公告日2006-05-12

原文格式PDF
申请/专利权人
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申请/专利号KR19990020235
发明设计人 루프볼프강;
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申请日1999-06-02
分类号H01L33/00;G03B27/53;H01L35/34;
国家 KR
入库时间 2022-08-21 21:23:48

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