首页>
外国专利>
A METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND AN APPARATUS FOR ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE
A METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND AN APPARATUS FOR ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE
展开▼
机译:一种与第二条有关的第一条条款的协商方法以及一种与第二条有关的第一条条款的协商装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method and apparatus is described for aligning a first article relative to a second article, for example for aligning a nanoimprint template with a semiconductor wafer. The method comprises the steps of: providing said second article with at least one flexible structure fixed relative thereto at at least one point, providing a first article having at least one surface relief marking thereon, providing a detector for measuring an interaction of the flexible structure with the surface relief marking and generating detector signals relating to said interaction, identifying with the help of the detector signals the position of the flexible structure and thus of the second article with respect to the surface relief marking and generating relative movement between the first and second articles to achieve a desired alignment between the first and second articles defined by the surface relief marking. In this method and apparatus the flexible structure is brought into contact with the surface relief marking.
展开▼