Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom

• 1. 用于晶片级包装中光刻胶剥离和残留物去除的组合物和方法 [P] . 中国专利： CN101116178B . 2011.06.15
• 2. 用于晶片级包装中光刻胶剥离和残留物去除的组合物和方法 [P] . 中国专利： CN101116178A . 2008-01-30
• 3. METHOD AND APPARATUS FOR ROTATION OF A WORKPIECE IN SUPERCRITICAL FLUID SOLUTIONS FOR REMOVING PHOTO RESIST, RESIDUES AND PARTICLES THEREFROM [P] . 欧洲知识产权局专利： EP1691940A2 . 2006-08-23

  机译： 在超临界流体溶液中旋转工件的方法和装置，以去除光刻胶，残留物和微粒

• 4. METHOD AND APPARATUS FOR ROTATION OF A WORKPIECE IN SUPERCRITICAL FLUID SOLUTIONS FOR REMOVING PHOTO RESIST, RESIDUES AND PARTICLES THEREFROM [P] . 世界知识产权组织专利： WO2004090339A3 . 2005-09-29

  机译： 在超临界流体溶液中旋转工件的方法和装置，以去除光刻胶，残留物和微粒

• 5. METHOD AND APPARATUS FOR ROTATION OF A WORKPIECE IN SUPERCRITICAL FLUID SOLUTIONS FOR REMOVING PHOTO RESIST, RESIDUES AND PARTICLES THEREFROM [P] . 世界知识产权组织专利： WO2004090339A2 . 2004-10-21

  机译： 在超临界流体溶液中旋转工件的方法和装置，以去除光刻胶，残留物和微粒

• 1. Simulation of particles settling in power-law fluids by combined lattice Boltzmann-smoothed profile methods [J] . Hamideh Rouhani Tazangi, Ataallah Soltani Goharrizi, Ebrahim Jahanshahi Javaran 国际泥沙研究（英文版） . 2021,第005期
• 2. A constrained particle dynamics for continuum-particle hybrid method in micro-and nano-fluidics [J] . Jia Cui, GuoWei He, Dewei Qi 力学学报：英文版 . 2006,第006期
• 3. A STRONG SOLUTION OF NAVIER-STOKES EQUATIONS WITH A ROTATION EFFECT FOR ISENTROPIC COMPRESSIBLE FLUIDS [J] . Tuowei CHEN, Yongqian ZHANG 数学物理学报（英文版） . 2021,第005期
• 4. Supercritical Fluid Extractron Method Evaluation Vacuum Residue- Selection and Application Investigation for Supercritical Fluid [C] . Zhao dezhi, Wang renan . 1997
• 5. Part 1. Application of supercritical fluid extraction for enantiospecific determination of chlordane residues in fish tissue. Part 2. Prediction of retention time of long chain alcohol phenyl ethers in density programmed supercritical fluid chromatography. Part 3. Evaluation of biogenic oil based technical fluids. [D] . Seemamahannop, Rachadaporn. 2003
• 6. Impacts of Extraction Methods in the Rapid Determination of Atrazine Residues in Foods using Supercritical Fluid Chromatography and Enzyme-Linked Immunosorbent Assay: Microwave Solvent vs. Supercritical Fluid Extractions [O] . Mohamed H. El-Saeid, Ijeoma Kanu, Ebere C. Anyanwu, 2005
• 7. Impacts of Extraction Methods in the Rapid Determination of Atrazine Residues in Foods using Supercritical Fluid Chromatography and Enzyme- Linked Immunosorbent Assay: Microwave Solvent vs. Supercritical Fluid Extractions [O] . Mohamed H. El-saeid, Ijeoma Kanu, Ebere C. Anyanwu, 2015
• 8. Liquefaction of coals using ultra-fine particle, unsupported catalysts: In situ particle generation by rapid expansion of supercritical fluid solutions. Final technical report [R] . 1994

• 1. Preparation of TiO_2-MoO_3 nano-composite photo-catalyst by supercritical fluid dry method [J] . ZHANGJing-chang LIQing CAOWei-liang . 环境科学学报：英文版 . 2005,第2期
• 2. Coacervation Microencapsulation of CaCOsub3/subParticles with a Fluoropolymer by Pressure-induced Phase Separation of Supercritical Carbon Dioxide Solutions [J] . Kenji Mishima ,Haruo Yokota ,Takafumi Kato . 材料物理与化学进展（英文） . 2012,第4期
• 3. 化学机械抛光后清洗中颗粒去除及设备改进 [C] . Hegeng Mei ,梅赫赓 ,Tongqing wang . 2013年海峡两岸平坦化技术研讨会 . 2013
• 4. 溶液絮凝--颗粒吸附--膜过滤去除水体中阴阳离子染料工艺研究 [A] . 马欢欢 . 2019