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The MEMS gyroscope which has parameter profit
The MEMS gyroscope which has parameter profit
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机译：具有参数获利的MEMS陀螺仪
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摘要
The microminiature electronic machine (MEMS) the gyroscope, one which is connected to the baseplate mechanically by the spring or has plural proof masses. With the case of the gyroscope of double proof mass, motive force unidirectionally and mutually shifting 180 degree phase at those resonance frequencies, drives proof mass. Motion of the proof mass where the electrode for inspection responds to Coriolis power is inspected. The motion which is pulled up by Coriolis power is perpendicular direction vis-a-vis the motion which is pulled up by motive force. In order to offer the parameter expansion of Coriolis power AC pump voltage of 2 times that motor frequency is impressed in the electrode for inspection. AC pump voltage changes mechanical of the gyroscope and electric profit.
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