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Non-confocal, confocal, and substrate caused by the interference confocal microscopy - compensation of the refractive index mismatch effect in the medium interface

机译:干涉共焦显微镜引起的非共焦,共焦和基质-补偿介质界面中的折射率失配效应

摘要

An interferometric microscope for a target object in a certain medium, to implement the interference measurement of a plurality of positions within the object with a mismatch between the refractive index of the medium between the object and generating an input beam a light source; then receives the input beam, then generate a measurement beam, and generating a feedback measurement beam for spots imaged on the selected spot in the object, said selected, and the feedback measurement beam, the measuring beam configured interferometer to generate an interference beam by combining the reference beam and; includes a detection system arranged and location, so as to receive the interference beam, the feedback measurement beam, the detection system from the object move along a path extending, and a compensation layer made of material disposed position in the path of return measurement beam, said compensation layer, along the path of the return measurement beam, the interferometer, the said object and characterized by generating a refractive index mismatch for compensating the refractive index mismatch between the medium, the interference microscope.
机译:一种用于在某种介质中的目标物体的干涉显微镜,用于对物体内多个位置进行干涉测量,使物体之间的介质的折射率之间不匹配,并产生输入光束的光源;然后接收输入光束,然后生成测量光束,并生成针对成像在对象中选定光斑上的光斑的反馈测量光束,所述选定光斑和反馈测量光束,测量光束配置为干涉仪,通过组合产生干涉光束参考光束;包括布置和定位的检测系统,以接收干涉光束,反馈测量光束,该检测系统使来自物体的物体沿延伸的路径运动,以及由材料制成的补偿层布置在返回测量光束的路径中,所述补偿层,沿着返回测量光束,干涉仪,所述物体的路径,其特征在于,产生折射率失配以补偿介质,干涉显微镜之间的折射率失配。

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