首页> 外国专利> IONIZATION METHOD OF NEEDLE-LIKE SAMPLE SURFACE LAYER BY USING BOTH ULTRASHORT PULSE LASER CONVERGENCE AND HIGH VOLTAGE APPLICATION, AND ANALYTICAL METHOD OF NEEDLE-LIKE SAMPLE SURFACE LAYER USING IT

IONIZATION METHOD OF NEEDLE-LIKE SAMPLE SURFACE LAYER BY USING BOTH ULTRASHORT PULSE LASER CONVERGENCE AND HIGH VOLTAGE APPLICATION, AND ANALYTICAL METHOD OF NEEDLE-LIKE SAMPLE SURFACE LAYER USING IT

机译：结合超短脉冲激光融合和高压应用的针样表面层电离方法及利用它的针样表面层解析方法

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摘要

PPROBLEM TO BE SOLVED: To solve a problem that, for the conventional ionization of a needle-like sample, a pulse high voltage is applied to a needlepoint thereof or it is irradiated with a nanosecond laser, however, the needle-like sample is broken or a resolution is degraded by a temperature rise by heating in a three-dimensional atom probe electric field microscope and the analysis of a semiconductor or an insulation material is extremely difficult when such an ionization method is used. PSOLUTION: This ionization method allows the analysis of a three-dimensional distribution of elements without breaking a needle-like sample having residual stress inside, and not only enhances resolution but also allows the analysis of a semiconductor or an insulation material by sequentially ionizing and removing atoms on the surface layer of the needle-like sample by converging an ultrashort pulse laser beam on the needlepoint of the needle-like sample having a curvature radius substantially smaller than a wavelength applied with the high voltage below a threshold generated by field evaporation. PCOPYRIGHT: (C)2006,JPO&NCIPI

机译：

要解决的问题：为了解决以下问题：对于常规的针状样品的电离，将脉冲高压施加到其针尖或用纳秒激光照射，但是，针状由于在三维原子探针电场显微镜中加热引起的温度升高，样品破裂或分辨率降低，并且当使用这种电离方法时，半导体或绝缘材料的分析非常困难。

解决方案：这种电离方法可以分析元素的三维分布，而不会破坏内部残留应力的针状样品，不仅可以提高分离度，而且可以通过顺序分析半导体或绝缘材料通过将超短脉冲激光束会聚在曲率半径大大小于施加高电压的波长（低于电场产生的阈值）的针状样品的针尖上，将针状样品表面层上的原子电离并除去蒸发。

版权：（C）2006，JPO＆NCIPI 展开▼

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公开/公告号JP2006260780A

专利类型
公开/公告日2006-09-28

原文格式PDF
申请/专利权人 JAPAN ATOMIC ENERGY AGENCY;
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申请/专利号JP20050072440
发明设计人 NISHIMURA AKIHIKO;MINEHARA EISUKE;
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申请日2005-03-15
分类号H01J49/16;G01N27/62;G01N27/64;G01N33/20;H01J37/285;H01J49/42;
国家 JP
入库时间 2022-08-21 21:54:50

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