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Power MOSFET for motor vehicle technology has vertical power MOSFET in semiconductor body with adjacent temperature sensor over insulation filled cavity
Power MOSFET for motor vehicle technology has vertical power MOSFET in semiconductor body with adjacent temperature sensor over insulation filled cavity
A power MOSFET comprises a vertical MOSFET in a semiconductor body (1) with an adjacent temperature sensor. The semiconductor body has an enhanced heat resistance below the sensor. Preferably this arises through a cavity (17) in the body below the sensor that is filled with insulator.
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