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Clean room device for manufacturing or production process for chemical, pharmaceutical, biological, medical, electronics, micromechanics or optical applications with modelling of gas flow dependent on production system
Clean room device for manufacturing or production process for chemical, pharmaceutical, biological, medical, electronics, micromechanics or optical applications with modelling of gas flow dependent on production system
The clean room device (1) has a work plate (4) provided with openings (6) and a gas feed (3) positioned above the work plate for directing a gas into the working zone (5) between the gas feed and the work plate, extracted via the openings in the latter. A device (9) is provided between the gas feed and the work plate for modelling a flow profile for the gas flow dependent on a production system positioned on the work plate. An independent claim for application of the clean room device for use in a clean room with a lower purity level is also included.
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