首页> 外国专利> HIGH PURITY NICKEL/VANADIUM SPUTTERING COMPONENTS;GUO WEI AND METHODS OF MAKING SPUTTERING COMPONENTS

HIGH PURITY NICKEL/VANADIUM SPUTTERING COMPONENTS;GUO WEI AND METHODS OF MAKING SPUTTERING COMPONENTS

机译:高纯镍/钒溅射组分;郭伟及其制备方法

摘要

The invention includes sputtering components, such as sputtering targets, comprising high-purity Ni-V. The sputtering components can have a fine average grain size throughout, with an exemplary fine average grain size being a grain size less than or equal to 40 microns. The invention also includes methods of making high- purity Ni-V structures.
机译:本发明包括包含高纯度Ni-V的溅射组分,例如溅射靶。整个溅射成分可以具有细的平均晶粒尺寸,示例性的细平均晶粒尺寸是小于或等于40微米的晶粒尺寸。本发明还包括制备高纯度Ni-V结构的方法。

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