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HIGH PURITY NICKEL/VANADIUM SPUTTERING COMPONENTS;GUO WEI AND METHODS OF MAKING SPUTTERING COMPONENTS
HIGH PURITY NICKEL/VANADIUM SPUTTERING COMPONENTS;GUO WEI AND METHODS OF MAKING SPUTTERING COMPONENTS
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机译:高纯镍/钒溅射组分;郭伟及其制备方法
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摘要
The invention includes sputtering components, such as sputtering targets, comprising high-purity Ni-V. The sputtering components can have a fine average grain size throughout, with an exemplary fine average grain size being a grain size less than or equal to 40 microns. The invention also includes methods of making high- purity Ni-V structures.
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