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LOAD LOCK CHAMBER FOR SEMICONDUCTOR MANUFACTURE ENABLING OBSERVATION OF WAFER SCRATCH AND WAFER SLIDING IN CHAMBER WITH NAKED EYES
LOAD LOCK CHAMBER FOR SEMICONDUCTOR MANUFACTURE ENABLING OBSERVATION OF WAFER SCRATCH AND WAFER SLIDING IN CHAMBER WITH NAKED EYES
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机译：半导体制造的负载锁定腔室，使观察带有裸眼的腔室中的晶圆刮擦和晶圆滑动
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摘要
Purpose: the load lock chamber for semiconductors manufacture is arranged to carry out the position adjustment an of box, is grabbed by enabling a processor of observation for a chip and a chip slip event in the load lock chamber with naked eyes. Construction: the load lock chamber (100) for semiconductors manufacture includes an inner space, an opening (110), an external door (120) and a smooth device (160). Inner space includes an elevator (140), and a wafer cassette is mounted on it. Open service is directed to inner space or collected from inner space as the paths for being used for wafer cassette. External door includes a show window (130), close/open opening. One inside of room can pass through show window. Light device is implemented in inner space.
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