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SURFACE STRUCTURES FOR HALO REDUCTION IN ELECTRON BOMBARDED DEVICES
SURFACE STRUCTURES FOR HALO REDUCTION IN ELECTRON BOMBARDED DEVICES
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机译:电子封装设备中光晕还原的表面结构
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摘要
An electron sensing device includes a cathode (6, 50) for providing a source of electrons, and an anode (8, 80, 83, 86, 89) disposed opposite to the cathode for receiving electrons emitted from the cathode. The anode includes a textured surface for reducing halo in the output signal of the electron sensing device. The textured surface may include either pits (85) or inverted pyramids (87).
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