首页>
外国专利>
Direct, low frequency capacitance measurement for scanning capacitance microscopy
Direct, low frequency capacitance measurement for scanning capacitance microscopy
展开▼
机译:直接低频电容测量,用于扫描电容显微镜
展开▼
页面导航
摘要
著录项
相似文献
摘要
A system and method for measuring capacitance between a probe and a semiconductor sample, which may be useful in the field of scanning capacitance microscopy (SCM). The present invention also includes a method for analyzing measured capacitance data by subtracting any changes in capacitance that are due to changes in long-range stray capacitance that occur when the probe assembly is scanned.
展开▼