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Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
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机译：使用摩擦驱动和挠性铰链的低成本，高速，紧凑的纳米精密运动平台的方法和设备
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摘要
A friction drive including a drive shaft that is in rotational motion and in frictional contact with a follower at a contact area. The drive shaft transfers a thrust at the contact area. The follower receives the thrust and provides motion in response to the thrust. A flexure hinge couples the drive shaft to the follower with a constant force while restraining movement of the contact area in the direction of the thrust.
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