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METHOD AND APPARATUS FOR LOW-COST AND COMPACT HIGH- SPEED MOVING PRECISE NANOMETER MOVING STAGE USING FRICTIONAL DIVE AND FLEXIBLE HINGE
METHOD AND APPARATUS FOR LOW-COST AND COMPACT HIGH- SPEED MOVING PRECISE NANOMETER MOVING STAGE USING FRICTIONAL DIVE AND FLEXIBLE HINGE
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机译：利用摩擦潜水和柔性铰链进行低成本，紧凑，高速，精密纳米运动阶段的方法和装置
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摘要
PROBLEM TO BE SOLVED: To provide a low-cost and compact precise moving system which can operate at a high speed having the resolution of moving in a nanometer range.;SOLUTION: The precise moving system comprises: a drive shaft for rotatably moving and having a contact region for transmitting thrust by frictional contact; a driven element receiving the thrust and brought into frictional contact with the drive shaft in a contact region for imparting movement in response to the thrust; and a flexible hinge for connecting the drive shaft to the driven element by a predetermined force and limiting the movement of the contact region in the direction of the thrust.;COPYRIGHT: (C)2004,JPO
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