A vibration isolated table for a charged particle beam apparatus is provided with a shock protection element (5). ;The vibration isolated table (1) has a frame (2) and a load plate (3) being connected to the frame through vibration dampers (4). The shock protection element is connected to the frame (2) and extends over the load plate (3). There is free space (6) between a top plate (7) and the load plate (3), so that shock impacts are transferred to the frame and no longer to the load plate on which the charged particle beam is mounted.
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