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Process method of photoresist field board, production method of field board for record medium and production method of record medium, photoresist field board, field board and record medium for record medium

机译:光刻胶场板的加工方法,记录介质的场板的制造方法及记录介质的生产方法,光刻胶场板,场板和记录介质的记录介质

摘要

In record medium, unevenness pattern after the developing it is process method of the photoresist field board whose it is possible to make minute and uniform width, production method of the field board for record medium, and production method of record medium even with when the laser whose wave length is long relatively high accuracy the pre- pit is formed at the time of, is used. Photoresist field board 108 light absorption layer 108b and photosensitive material layer 108c is laminated by order on glass baseplate, 108a is exposed due to the fact that laser beam 102 condenses in photosensitive material layer 108c, the unevenness pattern which corresponds to the pre- pit is formed. For example the pit length which it should form when it is shorter than 4T, as, it changes the duty ratio in the pulse signal line which is input into strength modulator 109 in the abbreviation 50% - 65% range, pit length of the pre- pit becomes short the pulse signal line whose duty ratio is high is formed, when pit length is above 4T, duty ratio forms the fixed pulse signal line with the pit length of the pre- pit, modulates the aforementioned laser beam on the basis of the particular pulse signal line.
机译:在记录介质中,显影后的凹凸图案是可以使宽度均匀且微小的光致抗蚀剂型场板的加工方法,记录介质用场板的制造方法以及即使在激光照射下也可以制造的记录介质的方法。使用波长较长,精度较高的预制凹坑。将光致抗蚀剂场板108的光吸收层108b和光敏材料层108c依次层叠在玻璃基板上,由于激光束102会聚在光敏材料层108c中,因此曝光108a的凹凸图案是与凹坑对应的凹凸图案。形成。例如,当其小于4T时应形成的凹坑长度,因为它改变了输入到强度调制器109中的脉冲信号线中的占空比,缩写为50%至65%的范围,前者-凹坑变短,形成占空比高的脉冲信号线,当凹坑长度大于4T时,占空比与预凹坑的凹坑长度形成固定的脉冲信号线,根据特定的脉冲信号线。

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