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TRAP CONSTRUCTION OF EXHAUST SYSTEM AND AUXILIARY TRAP, AND METHOD FOR ENHANCING COLLECTION EFFICIENCY OF EXHAUST TRAP IN EXHAUST SYSTEM
TRAP CONSTRUCTION OF EXHAUST SYSTEM AND AUXILIARY TRAP, AND METHOD FOR ENHANCING COLLECTION EFFICIENCY OF EXHAUST TRAP IN EXHAUST SYSTEM
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机译：排气系统和辅助陷阱的捕集结构，以及提高排气系统中排气捕集效率的方法
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摘要
PROBLEM TO BE SOLVED: To provide a new trap construction in an exhaust system, in which a collection efficiency of an exhaust trap can be increased largely with suppressing increase in size of the exhaust system.;SOLUTION: The trap construction in the exhaust system is a trap system for an exhaust system for capturing a reaction product in an exhaust gas which system is constituted of an exhaust path 132 discharging the waste gas produced by various kinds of treatments based on the reaction of a gas compound under vacuum. An exhaust trap 133 is arranged at the upstream side of the exhaust path 132, and a separate auxiliary trap 134 is arranged at the downstream side of the exhaust trap 133. This auxiliary exhaust trap 134 is provided with a plurality of fins arranged in order toward a direction of the path inside the piping constituting the exhaust path.;COPYRIGHT: (C)2005,JPO&NCIPI
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