首页>
外国专利>
ELECTRON BEAM FOCUS CONTROLLING APPARATUS, ATTITUDE CONTROLLING APPARATUS FOR ELECTRON BEAM IRRADIATION HEAD, METHOD FOR CONTROLLING ELECTRON BEAM FOCUS AND METHOD FOR CONTROLLING ATTITUDE OF ELECTRON BEAM IRRADIATION HEAD
ELECTRON BEAM FOCUS CONTROLLING APPARATUS, ATTITUDE CONTROLLING APPARATUS FOR ELECTRON BEAM IRRADIATION HEAD, METHOD FOR CONTROLLING ELECTRON BEAM FOCUS AND METHOD FOR CONTROLLING ATTITUDE OF ELECTRON BEAM IRRADIATION HEAD
PROBLEM TO BE SOLVED: To control changes in the attitude of a static floating pad so as to keep the attitude of the hydrostatic floating pad and to avoid contact with an original disk even when the static floating pad passes between a turntable and a focus stage.;SOLUTION: The attitude stabilization controlling system is equipped with: a primary vacuum groove negative pressure sensor 41 and a secondary vacuum groove negative pressure sensor 42 to detect changes in the negative pressure in a primary vacuum groove 32 and a secondary vacuum groove 33 of the static floating pad 6 caused by the movement of an original disk 11 in the radial direction accompanying electron beam focus control; a negative pressure supply part 44 to render attitude stabilizing grooves 31-1 to 31-4 into vacuum by the negative pressure; and a attitude stabilization controlling part 43 to render the attitude stabilizing grooves 31-1 to 31-4 into vacuum by the negative pressure by the negative pressure supply part 44 when changes in the negative pressure in the primary vacuum groove 32 and in the secondary vacuum groove 33 are detected by the primary vacuum groove negative pressure sensor 41 and by the secondary vacuum groove negative pressure sensor 42.;COPYRIGHT: (C)2005,JPO&NCIPI
展开▼
