首页> 外国专利> Thin film measurement using X-ray fluoroscopy, e.g. for measurement of the thickness of a galvanized layer, whereby a diaphragm for shaping an X-ray examination beam is matched to the geometry of the component to be examined

Thin film measurement using X-ray fluoroscopy, e.g. for measurement of the thickness of a galvanized layer, whereby a diaphragm for shaping an X-ray examination beam is matched to the geometry of the component to be examined

机译:使用X射线荧光透视法进行薄膜测量,例如用于测量镀锌层的厚度,从而使用于形成X射线检查光束的光阑与要检查的组件的几何形状匹配

摘要

Device for measuring the thickness of thin films using X-ray fluoroscopy has an X-ray tube and a diaphragm device (17) placed between it and a layer to be measured. The diaphragm device comprises an X-ray absorbing zone (26) and an opening (28). The geometry of the opening is such that it is at least partially matched to the geometry of the layer to be measured.
机译:使用X射线荧光透视法测量薄膜厚度的装置具有X射线管和位于其与待测层之间的隔膜装置(17)。隔膜装置包括X射线吸收区(26)和开口(28)。开口的几何形状使得其至少部分地与要测量的层的几何形状匹配。

著录项

  • 公开/公告号FR2849182A1

    专利类型

  • 公开/公告日2004-06-25

    原文格式PDF

  • 申请/专利号FR20030014170

  • 发明设计人

    申请日2003-12-03

  • 分类号G01B15/02;

  • 国家 FR

  • 入库时间 2022-08-21 22:39:17

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