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Position measurement system for a position control loop and a position measurement machine combines first accurate measurements with less accurate measurements to obtain highly dynamic and accurate measurements
Position measurement system for a position control loop and a position measurement machine combines first accurate measurements with less accurate measurements to obtain highly dynamic and accurate measurements
Combined position measurement system has first (1) and second (2) position measuring systems that generate first more accurate (POS1) and second less accurate (POS2) measurement values that are combined to form a measurement value (POS). A linking unit (7) serves to correct the second position measurement using a correction value (Korr) that is derived from the difference between the first position value and the combined position value. The invention relates particularly to combination of a mechanical feeler system that is stable against environmental fluctuations and a very precise, but less accurate due to environmentally induced fluctuations, interferometer measurement system.
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