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METHOD OF SELF-ALIGNING AN OXIDE APERTURE WITH AN ANNULAR INTRA-CAVITY CONTACT IN A LONG WAVELENGTH VCSEL
METHOD OF SELF-ALIGNING AN OXIDE APERTURE WITH AN ANNULAR INTRA-CAVITY CONTACT IN A LONG WAVELENGTH VCSEL
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机译:自对准长腔VCSEL环形腔内氧化孔的方法
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摘要
A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser.
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