Large Aperture Low Threshold Current 980 nm VCSELs Fabricated with Pulsed Anodic Oxidation

CUI Jin-jiang; NING Yong-qiang; LI Te; LIU Guang-yu; ZHANG Yan; PENG Biao; SUN Yan-fang; WANG Li-jun

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Large Aperture Low Threshold Current 980 nm VCSELs Fabricated with Pulsed Anodic Oxidation

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摘要

Pulsed anodic oxidation technique, a new way of forming current blocking layers, was successfully used in ridge-waveguide QW laser fabrication. This method was applied in 980 nm VCSELs fabrication to form a high-quality native oxide current blocking layer, which simplifies the device process. A significant reduction of threshold current and a distinguished device performance are achieved. The 500 μm diameter device has a current threshold as low as 0.48 W. The maximum CW operation output power at room temperature is 1.48 W. The lateral divergence angle θ‖ and vertical divergence angle θ⊥ are as low as 15.3° and 13.8° without side-lobes at a current of 6 A.

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来源
《光机电信息》 |2007年第12期|36-40|共5页
作者
CUI Jin-jiang; NING Yong-qiang; LI Te; LIU Guang-yu; ZHANG Yan; PENG Biao; SUN Yan-fang; WANG Li-jun;
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作者单位

Key Laboratory of Excited State Processes Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China;

Graduate School of Chinese Academy of Sciences Beijing 100039 China;

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原文格式 PDF
正文语种 chi
中图分类光电子技术、激光技术;
关键词
VCSELs; bottom-emitting; PAO; blocking layer; low threshold; native oxide; self-aligned; mesa; quantum well;

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4. Photocatalytic activity of ferric oxide/titanium dioxide nanocomposite films on stainless steel fabricated by anodization and ion implantation [J] . Wei-ting Zhan ,Hong-wei Ni ,Rong-sheng Chen . 矿物冶金与材料学报 . 2013,第008期
5. Bs→ηcf0(980)和Ds→f0(980)e+ve与f0(980)的结构 [C] . 柯红卫 . 全国第十五届重味物理和CP破坏研讨会 . 2017
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Large Aperture Low Threshold Current 980 nm VCSELs Fabricated with Pulsed Anodic Oxidation

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