PURPOSE:To enhance the efficiency of converting the supplied electric energy into X-rays. CONSTITUTION:An X-ray laser device is structured so that a target device T consisting of a target base 38, anode 34, and cathode 35 is installed in a vacuum vessel 31. A laser beam is cast from a laser beam source 43 onto a target 39 of this target device T so that a gas-form plasma is distributed uniformly, followed by impression of a discharge voltage between the anode 34 and cathode 35, which generates a discharge plasma to cause the Z-pinched condition, and thus X-rays are emitted. The X-rays pass a tunnel 36 in the cathode 35 and reflected by an X-ray reflecting mirror 37 to return to the anode side, so that the gain of the emitted X-rays is enhanced and laser oscillation is generated. The oscillated X-rays are taken out to outside the vacuum vessel 31 through a window 41.
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