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OPTICAL INTERFERENCE TYPE AE SENSOR, AE SENSOR UNIT, AND AE MEASUREMENT SYSTEM
OPTICAL INTERFERENCE TYPE AE SENSOR, AE SENSOR UNIT, AND AE MEASUREMENT SYSTEM
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机译：光学干涉型AE传感器，AE传感器单元和AE测量系统
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摘要
PROBLEM TO BE SOLVED: To provide an AE measurement system for AE analysis from a small- sized substance up to a large-sized one by making an AE sensor extremely small-sized, and preventing detection of an AE signal from being influenced by electromagnetic noises.;SOLUTION: Using a small-sized optical interference type microsensor made using MEMS (Micro Electro Mechanical System) technique, the AE measurement system is formed by an optical signal processing by the use of an AE sensor unit comprised of an optical fiber and optical parts. By selecting a wavelength of a measuring light source, the distance between a substance to be measured and the body of an AE measuring portion can be made longer.;COPYRIGHT: (C)2004,JPO
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