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Substrate surface cleaning and/or polishing apparatus e.g. for CD or DVD, positions polishing pads of differing grain or roughness w.r.t. surface of disk-like substrate
Substrate surface cleaning and/or polishing apparatus e.g. for CD or DVD, positions polishing pads of differing grain or roughness w.r.t. surface of disk-like substrate
The apparatus has a device for changing the distance between a substrate (12) and a first polishing device (14), and a device for periodically moving the polishing device and/or the substrate. One or more devices are provided for positioning at least two separate polishing devices (14) of differing grain or roughness, w.r.t. and parallel to the surface of the substrate (12) to be cleaned or polished. The polishing devices (14) have a planar or substantially planar surface.
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