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OXIDE TRANSPARENT CONDUCTIVE LAYER, TARGET FOR USE IN FORMING THE SAME, METHOD OF MANUFACTURING SUBSTRATE HAVING THE OXIDE TRANSPARENT CONDUCTIVE LAYER, ELECTRONIC APPARATUS AND LIQUID CRYSTAL DISPLAY DEVICE
OXIDE TRANSPARENT CONDUCTIVE LAYER, TARGET FOR USE IN FORMING THE SAME, METHOD OF MANUFACTURING SUBSTRATE HAVING THE OXIDE TRANSPARENT CONDUCTIVE LAYER, ELECTRONIC APPARATUS AND LIQUID CRYSTAL DISPLAY DEVICE
A transparent electrically conductive oxide film is composed of a compound oxide containing indium oxide, tin oxide, and zinc oxide and includes a connecting section, in which the tin content is higher than the zinc content at least in connecting section, and at least the connection section has crystallinity. Alternatively, in the transparent electrically conductive oxide film, the atomic percentage of zinc to the total of zinc, indium, and tin is in the range of about 1 at % through about 9 at %, the atomic ratio of tin to zinc is about 1 or more, the atomic percentage of tin to the total of zinc, indium, and tin is about 20 at % or less, and at least a portion thereof has crystallinity. An electronic apparatus provided with such a transparent electrically conductive oxide film as at least a portion of the electric circuit thereof, a target for forming a transparent electrically conductive oxide film, and a method for fabricating a substrate provided with a transparent electrically conductive oxide film are also disclosed.
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