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METHOD OF MEASURING MICROPATTERN, MICROPATTERN MEASUREMENT UNIT AND RECORDED MEDIA RECORDING MICROPATTERN MEASUREMENT PROGRAM
METHOD OF MEASURING MICROPATTERN, MICROPATTERN MEASUREMENT UNIT AND RECORDED MEDIA RECORDING MICROPATTERN MEASUREMENT PROGRAM
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机译：微型摄像机的测量方法，微型摄像机的测量单元和记录媒体的记录微型摄像机的测量程序
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摘要
Obtaining a pattern image of a fine pattern formed in the sample portion obtained image and, in the right section shapes, in the right, and the concentration distribution data acquisition unit a shape reflecting a pattern shape on the pattern image, the tangent of the outline of the shape obtaining a concentration distribution data on a straight line perpendicular to the and, in the edge detection unit, in the concentration distribution, and detecting the pattern edges from the coordinates data, the pattern shape measuring section, on the basis of the pattern edge coordinate and measure the shape of the pattern.
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