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METHOD OF MEASURING MICROPATTERN MICROPATTERN MEASUREMENT UNIT AND RECORDED MEDIA RECORDING MICROPATTERN MEASUREMENT PROGRAM
METHOD OF MEASURING MICROPATTERN MICROPATTERN MEASUREMENT UNIT AND RECORDED MEDIA RECORDING MICROPATTERN MEASUREMENT PROGRAM
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机译：微型计算机测量单元的测量方法和记录媒体的微型计算机测量程序
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摘要
PURPOSE: To measure a micro-pattern with high accuracy by accurately detecting the edge of a pattern. CONSTITUTION: A pattern image of a sample, where a micro-pattern is formed is obtained by an image acquisition part 331, in a graphic creating part 332, a graphic in which a pattern shape is reflected is created for the acquired pattern image, in a density distribution data acquiring part 333, density distribution data on a straight line vertical to the tangent of the contour of the graphic is acquired, in an edge detecting part 334, pattern edge coordinates are detected from the density distribution data, and in a pattern shape measuring part 335, the shape of a pattern is measured on the basis of the pattern edge coordinates.
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