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Bent-beam actuator for residual stress measurement in micro electro mechanical systemMEMS and its fabricating method and method of residual stress measurement using the bent beam actuator
Bent-beam actuator for residual stress measurement in micro electro mechanical systemMEMS and its fabricating method and method of residual stress measurement using the bent beam actuator
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机译：用于微机电系统中的残余应力测量的弯曲梁致动器及其制造方法和使用弯曲梁致动器的残余应力测量方法
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摘要
PURPOSE: A pattern for testing residual stress of a micro electro mechanical system, a method for fabricating the same and a method for measuring residual stress by using the same are provided to simultaneously measure residual compression stress and residual tension stress. CONSTITUTION: A sacrificial layer(302) is formed by oxidizing a silicon substrate(301). A multi-crystalline seed layer is deposited on the sacrificial layer(302). An epitaxial multi-crystalline silicon layer(304) is grown by using the multi-crystalline seed layer. An electrode(305) is formed at a predetermined region of the epitaxial multi-crystalline silicon layer(304). Then, a predetermined portion of the epitaxial multi-crystalline silicon layer(304) is removed through a dry etching process. After that, the sacrificial layer(302) formed below the epitaxial multi-crystalline silicon layer(304) is removed.
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