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INSPECTION DEVICE FOR MINUTE OBJECT ELEMENT, INSPECTION DEVICE FOR COLOR FILTER, INSPECTION METHOD FOR MINUTE OBJECT ELEMENT, MANUFACTURING METHOD FOR SUBSTRATE WITH PICTURE ELEMENT, AND PROGRAM
INSPECTION DEVICE FOR MINUTE OBJECT ELEMENT, INSPECTION DEVICE FOR COLOR FILTER, INSPECTION METHOD FOR MINUTE OBJECT ELEMENT, MANUFACTURING METHOD FOR SUBSTRATE WITH PICTURE ELEMENT, AND PROGRAM
PROBLEM TO BE SOLVED: To easily control a position of a measurement point for a color filter in which different color material membranes are arranged in a minute region when performing optical measurement to obtain a measured value securely.;SOLUTION: An inspection device for the color filter according to this invention obtains light from a linelike area through a slit 12 for a workpiece 30 including the arrangement of color material membranes. Then, this slit light is developed on a plane by a spectral optical element 13 to disperse it and then the dispersed light is converted into an electric signal by a two dimensional sensor element 10 to output it. Spectral transmissivity representing the color material membrane of each color is calculated based on the electric signals outputted from the two dimensional sensor element 10 to detect a thickness of each color material membrane formed on the workpiece 30.;COPYRIGHT: (C)2003,JPO
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