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EPMA analysis method using a Monte Carlo simulation
EPMA analysis method using a Monte Carlo simulation
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机译：使用Monte Carlo模拟的EPMA分析方法
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摘要
PROBLEM TO BE SOLVED: To obtain an EPMA analysis method using Monte Carlo simulation that can accurately analyze thin-film and minute-object samples that are smaller than an X-ray generation region, and can accurately carry out analysis by simulation with a small number of electrons. SOLUTION: An X-ray absorption model where a sample in a rectangular parallelepiped shape is buried into a matrix that is sufficiently larger than an X-ray generation region while merely the upper surface is being exposed is supposed, size in the vertical, horizontal, and depth directions of the sample in the X-ray absorption model is set according to the size and shape, at the same time, J=11.5Z×10-3 [Kev] and &Bgr;= 5.44Z2/3/E)×10-3 are used as ionized potential (Kev) and the constant of a screening parameter in each calculation expression of a scattering angle and the angle of rotation in the calculation expression, the energy loss of an electron, and a probability where the electron collides with an element, and the number of incident electrons is set to less than 1,000 for simulating.
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