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Workpiece measuring apparatus uses an image-processing device, especially for use in determining the position of contact pins, etc. on integrated circuits where the effects of scattered light have to be combated
Workpiece measuring apparatus uses an image-processing device, especially for use in determining the position of contact pins, etc. on integrated circuits where the effects of scattered light have to be combated
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机译:工件测量设备使用图像处理设备,特别是用于确定必须克服散射光影响的集成电路上的触针等的位置
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摘要
Device for measuring workpieces (1) has an image processing arrangement with optically transparent supports (3, 4) for positioning the workpiece with respect to an image-recording device. A scatter element (7) produces largely homogeneous diffuse illumination. The amount (V) by which the image-recording device extends beyond the side surfaces of the scatter device is so small that required measurement accuracy can be obtained without using shutter elements.
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