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Vacuum pump plant has fore-pump as liquid ring pump to create intermediate vacuum in range of rough, low vacuum, and side channel pump to create final vacuum

机译：真空泵厂具有前泵作为液环泵，以在粗，低真空和侧通道泵的范围内产生中等真空，以产生最终真空

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摘要

The vacuum pump plant has a fore-pump (6) as a liquid ring pump to create an intermediate vacuum in the range of a rough, low vacuum, and a side channel pump (4) to create the final vacuum. Through the fore-pump a rough vacuum within the range of 50mbar to 200mbar can be achieved, and through the side channel pump a fine vacuum of about 1mbar can be achieved. The side channel pump and fore-pump are arranged in series. An Independent claim is included for a procedure to create a final vacuum using a fore-pump to create a rough, low vacuum and a side channel pump to create a final vacuum.

机译：真空泵设备具有一个前泵（6）作为一个液环泵，以在粗真空，低真空范围内产生中等真空;还有一个侧通道泵（4）以产生最终真空。通过前级泵，可以实现50mbar至200mbar范围内的粗真空，通过侧通道泵，可以实现约1mbar的精细真空度。侧通道泵和前泵串联布置。独立索赔包括使用前泵产生粗糙，低真空和使用侧通道泵产生最终真空来产生最终真空的程序。

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公开/公告号DE10108631A1

专利类型
公开/公告日2002-09-12

原文格式PDF
申请/专利权人 SIEMENS AG;
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申请/专利号DE2001108631
发明设计人 HAHM OTTMAR;HOLZHEIMER GUENTER;KOPF MARKUS;DITTMAR RUDI;
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申请日2001-02-22
分类号F04B41/06;F04C19/00;F04D17/10;
国家 DE
入库时间 2022-08-22 00:27:08

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