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Wafer inspection system having recipe parameter library and method of setting recipe prameters for wafer inspection
Wafer inspection system having recipe parameter library and method of setting recipe prameters for wafer inspection
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机译：具有配方参数库的晶圆检查系统和设置用于晶圆检查的配方参数的方法
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摘要
The present invention relates to a method for setting the process parameters of the test equipment required for wafer inspection equipment and wafer inspection to check for defects or contamination of the wafer surface, completing the predetermined process, the invention of test equipment required for the wafer test when left to store the process parameters in advance in a library test wafers subjected to the same step process by using this, it is possible to shorten the time required for the setting of the process parameters, and to eliminate the deviation in accordance with the skill of the operator.
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