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MEMS-BASED SPATIAL-LIGHT MODULATOR WITH INTEGRATED ELECTRONICS
MEMS-BASED SPATIAL-LIGHT MODULATOR WITH INTEGRATED ELECTRONICS
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机译:具有集成电子功能的基于MEMS的空间光调制器
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摘要
Method and apparatus for forming an array (12) of reflective elements (18) for spatial light modulation. The array includes a substrate (24) supporting electronically addressable actuators (20), each associated with a corresponding reflective element, a coupling attaching each actuator to the corresponding reflective element to place each reflective element in a substantially planar surface. Each electronically addressable actuator responds to predetermined addressing from a processing circuit (26) to reposition the corresponding reflective element out of the planar surface a predetermined distance identified in the predetermined electronic addressing.
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