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MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

机译：基于MEMS的电化学地震仪依赖于CAC集成的三电极结构

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This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations.
机译：该研究开发了一种基于MEMS的电化学地震仪依赖于阴极 - 阳极 - 阴极（CAC）集成的三电极结构，其中两个阴极定位在硅晶片的两个表面上，而一个阳极定位在通孔的侧壁上硅晶片。进行设备设计和数值模拟以模拟三电极结构的功能，以便通过优化的密钥几何参数检测振动信号。然后通过微细加工制造CAC集成的三电极结构，其与传统的四电极结构相比，这表明了简化的制造过程。器件表征表明，CAC微震计的灵敏度比CAME6011（市售的四电极电化学地震仪）高的数量级，而噪声水平相当。此外，响应于随机振动，位于CAC和CME6011（0.985）之间的高相关系数，验证了发育出地震表的性能。因此，基于集成的三电极结构的开发的电化学微扰动表可以在地震观测和资源探索中提供新的视角。

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