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INTERFERENCE MEASURING DEVICE, INTERFERENCE MEASURING METHOD, AND SURFACE WORKING METHOD OF OPTICAL ELEMENT
INTERFERENCE MEASURING DEVICE, INTERFERENCE MEASURING METHOD, AND SURFACE WORKING METHOD OF OPTICAL ELEMENT
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机译：光学元件的干涉测量装置，干涉测量方法和表面加工方法
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摘要
PROBLEM TO BE SOLVED: To provide an interference measuring device and interference measuring method capable of surely performing the discrimination of a data area from a non-data area, and a surface working method of optical element capable of precisely and efficiently performing the surface working of an optical element.;SOLUTION: This interference measuring device comprises a light receiving element arranged on the incident surface of an interference light formed of the detecting light from a detecting surface and the reference light from a reference surface to detect the luminance distribution of the interference light and a scanning means for changing the phase difference between the detecting light and the reference light. The contrast of brightness caused in each position of the incident surface according to the change is determined in reference to the output of the receiving element, and the data area on which the interference light is incident is discriminated from the non-data area where no interference light is incident on the basis of the distribution in the incident surface of the contrast. Since the contrast of the interference light has a high constant value independently from the luminance of the incident light, the difference between the contrast of noise and the contrast of the interference light is remarkable. Accordingly, the sureness of the discrimination can be enhanced.;COPYRIGHT: (C)2002,JPO
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