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LIGHT INTERFERENCE-TYPE MEASURING DEVICE, WORKING DEVICE PROVIDED WITH THE MEASURING DEVICE, WORKING TOOL APPLIED TO THE WORKING DEVICE AND LIGHT INTERFERENCE-TYPE MEASURING METHOD
LIGHT INTERFERENCE-TYPE MEASURING DEVICE, WORKING DEVICE PROVIDED WITH THE MEASURING DEVICE, WORKING TOOL APPLIED TO THE WORKING DEVICE AND LIGHT INTERFERENCE-TYPE MEASURING METHOD
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机译：光干涉式测量装置，由该测量装置提供的工作装置，应用于该工作装置的工作工具和光干涉式测量方法
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摘要
PROBLEM TO BE SOLVED: To enable light interference measurement even in a rough surface state of a work under working operation. ;SOLUTION: A work 50 is supported by an XY table 4. First, a milling machine tool 16 is fixed on Z-axis spindle 8 and milling machining is performed. During the machining, a measuring jig 12 is fixed on the Z-axis spindle 8. As the measuring jig 12 rotates, a application member 20 of jig bottom spreads measuring liquid on a work to form uniform film. An interference meter 24 irradiates light on the skin through a measuring window of the measuring jig 12 to perform light interference measurement of the film surface. Even in the coarse surface of machining, the surface of the film is smooth so that interference pattern is produced because of the smooth surface and the surface shape of the machined surface can be known. After controlling the working conditions according to the measured results, milling is continued.;COPYRIGHT: (C)1999,JPO
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