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IN-PROCESS LIGHT INTERFERENCE TYPE MEASURING APPARATUS FOR WORKING AND WORKING DEVICE EQUIPPED WITH THE SAME, AND WORKING TOOL SUITABLE FOR IN-PROCESS LIGHT MEASUREMENT
IN-PROCESS LIGHT INTERFERENCE TYPE MEASURING APPARATUS FOR WORKING AND WORKING DEVICE EQUIPPED WITH THE SAME, AND WORKING TOOL SUITABLE FOR IN-PROCESS LIGHT MEASUREMENT
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机译:用于工作和工作装置的过程中光干扰类型测量设备,以及用于该过程中光测量的工作工具
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摘要
PROBLEM TO BE SOLVED: To provide an interference fringe type measuring apparatus by which a shape of a surface of an object to be worked can be measured precisely during working, that is, in process. ;SOLUTION: A workpiece 11 is mounted on a working mechanism base 3, and a lapping disk 5 set on the workpiece 11 is rotary driven. A lapping liquid is supplied between the lapping disk 5 and the workpiece 11. The lapping disk 5 is provided with a plurality of through-holes as measuring windows 9. Above the workpiece 11 an interferometer is installed across the lapping disk 5. The interferometer detects the interference fringes on a working surface of the workpiece 11 through the measuring windows. The rotational control of the lapping disk 5 and the position control of the workpiece 11 are conducted, based on the detection results.;COPYRIGHT: (C)1999,JPO
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