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DISPLACEMENT CONTROL METHOD OF MOVING TABLE, MEMBER MACHINING METHOD, X-Y STAGE DEVICE, AND MANUFACTURING METHOD OF X-Y STAGE DEVICE
DISPLACEMENT CONTROL METHOD OF MOVING TABLE, MEMBER MACHINING METHOD, X-Y STAGE DEVICE, AND MANUFACTURING METHOD OF X-Y STAGE DEVICE
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机译：工作台的位移控制方法，成员加工方法，X-Y台装置和X-Y台装置的制造方法
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摘要
PROBLEM TO BE SOLVED: To move a moving table on a circuit locus at high speed and high accuracy.;SOLUTION: In a displacement control method of the moving table 2 in the X-Y stage device 15 that has the moving table 2 guided on the X-Y plane and can shift a member loaded on the moving table 2 on the X-Y plane, the moving table 2 is guided on the X-Y plane by an X-Y guide mechanism 50 accompanied by an elastic deformation act, an X-directional natural frequency is made to coincide with a Y-directional natural frequency when the moving table 2 moves in the X-direction and the Y-direction, and the moving table 2 is moved on the circuit locus so that motion frequency f satisfies 0.66 Tf2.0 T for the natural frequency value T.;COPYRIGHT: (C)2002,JPO
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