首页> 外国专利> Micromechanical component has stop spring mounted on substrate via second flexural spring device with higher flexural stiffness that first flexural spring device for seismic mass

Micromechanical component has stop spring mounted on substrate via second flexural spring device with higher flexural stiffness that first flexural spring device for seismic mass

机译:微机械部件具有通过第二挠性弹簧装置安装在基板上的止动弹簧,其具有比第一挠性弹簧装置更高的抗弯刚度

摘要

The component has a seismic mass (3) spring-mounted on a substrate via a first flexural spring arrangement and that can be deflected in at least one direction by an acceleration that is limited by a stop arrangement with at least one stop (51) spring-mounted on the substrate via a second flexural spring device (50) with a higher flexural stiffness that the first flexural spring device.
机译:该部件具有通过第一挠性弹簧装置弹簧安装在基板上的抗震质量块(3),该抗震质量块可通过加速度来沿至少一个方向偏转,该加速度由具有至少一个挡块(51)弹簧的挡块布置限制通过具有比第一挠性弹簧装置更高的挠曲刚度的第二挠性弹簧装置(50)将其安装在基板上。

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