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LOW DIELECTRIC CONSTANT FILMS WITH HIGH GLASS TRANSITION TEMPERATURES MADE BY ELECTRON BEAM CURING

机译:电子束固化制成的具有高玻璃化转变温度的低介电常数薄膜

摘要

Production of a dielectric coating on a substrate whereby a poly(arylene ethers) or fluorinated poly(arylene ethers) layer is cured by exposure to electron beam radiation. A wide area electron beam is used which causes chemical reactions to occur in the polymer structure which are thought to cause cross-links between polymer chains. The cross-links lead to higher mechanical strength and higher glass transition temperature, lower thermal expansion coefficient, greater thermal-chemical stability and greater resistance to aggressive organic solvents. The polymer layer may also be optionally heated, thermally annealed, and/or exposed to UV actinic light.
机译:在基材上生产介电涂层,从而通过暴露于电子束辐射来固化聚(亚芳基醚)或氟化聚(亚芳基醚)层。使用广域电子束,其引起聚合物结构中发生化学反应,据认为这引起聚合物链之间的交联。交联导致更高的机械强度和更高的玻璃化转变温度,更低的热膨胀系数,更高的热化学稳定性以及对侵蚀性有机溶剂的更大抵抗力。聚合物层还可以任选地被加热,热退火和/或暴露于UV光化光。

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