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LOW DIELECTRIC CONSTANT FILMS WITH HIGH GLASS TRANSITION TEMPERATURES MADE BY ELECTRON BEAM CURING
LOW DIELECTRIC CONSTANT FILMS WITH HIGH GLASS TRANSITION TEMPERATURES MADE BY ELECTRON BEAM CURING
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机译:电子束固化制成的具有高玻璃化转变温度的低介电常数薄膜
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摘要
Production of a dielectric coating on a substrate whereby a poly(arylene ethers) or fluorinated poly(arylene ethers) layer is cured by exposure to electron beam radiation. A wide area electron beam is used which causes chemical reactions to occur in the polymer structure which are thought to cause cross-links between polymer chains. The cross-links lead to higher mechanical strength and higher glass transition temperature, lower thermal expansion coefficient, greater thermal-chemical stability and greater resistance to aggressive organic solvents. The polymer layer may also be optionally heated, thermally annealed, and/or exposed to UV actinic light.
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