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METHOD FOR MANUFACTURING DEVICE OR METHOD FOR MANUFACTURING DIFFRACTION OPTICAL DEVICE, AND DIE FOR MANUFACTURE OF DIFFRACTION OPTICAL DEVICE, DIFFRACTION OPTICAL DEVICE AND OPTICAL SYSTEM SUCH AS OPTICAL APPLIANCE BY THAT METHOD FOR MANUFACTURING DIFFRACTION OPTICAL DEVICE
METHOD FOR MANUFACTURING DEVICE OR METHOD FOR MANUFACTURING DIFFRACTION OPTICAL DEVICE, AND DIE FOR MANUFACTURE OF DIFFRACTION OPTICAL DEVICE, DIFFRACTION OPTICAL DEVICE AND OPTICAL SYSTEM SUCH AS OPTICAL APPLIANCE BY THAT METHOD FOR MANUFACTURING DIFFRACTION OPTICAL DEVICE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a device or a method for manufacturing a diffraction optical device by which a diffraction optical device of high accuracy can be obtained and stably manufactured in a short time at a low cost and to provide a die for the manufacture of a diffraction optical device, diffraction optical device and optical system such as an optical appliance by the method for manufacturing a diffraction optical device. ;SOLUTION: The method for manufacturing a device such as a diffraction optical device is aimed to form a step-like form having a n-step cross section on a substrate. In the method, a first etching mask formed in the lowest n-th step part is used as the referential to regulate the position of one side of the n-1-th step part as the next step to the n-the step, and when the rest of the steps from the n-th step are to be successively formed, the aperture of the etching mask to regulate the position of the other side of each step is widened corresponding to the number of steps and etching is repeated to form the step-like for with n steps.;COPYRIGHT: (C)2001,JPO
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