CARBON NANOTUBE THIN FILM DEPOSITION ECR PLASMA CVD SYSTEM USING SLOT ANTENNA AND METHOD FOR DEPOSITING THE SAME THIN FILM

• 1. ECR-PEMOCVD系统低温沉积ZnO透明导电薄膜的制备方法 [P] . 中国专利： CN103014676B . 2015.02.25
• 2. ECR-PEMOCVD系统低温沉积ZnO透明导电薄膜的制备方法 [P] . 中国专利： CN103014676A . 2013-04-03
• 3. ECR PLASMA ENHANCED CVD SYSTEM FOR CARBON NANOTUBE THIN FILM DEPOSITION, AND METHOD OF DEPOSITION FOR THE THIN FILM [P] . 日本专利： JP2001192829A . 2001-07-17

  机译： 碳纳米管薄膜沉积的ECR等离子增强CVD系统及薄膜沉积方法

• 4. PLASMA ENHANCED CVD SYSTEM FOR LARGE-DIAMETER CARBON NANOTUBE THIN FILM DEPOSITION, AND METHOD OF DEPOSITION FOR THE THIN FILM [P] . 日本专利： JP2001192830A . 2001-07-17

  机译： 大直径碳纳米管薄膜沉积的等离子增强CVD系统及薄膜沉积方法

• 5. THIN FILM DEPOSITION METHOD AND THIN FILM DEPOSITION SYSTEM BY PLASMA CVD METHOD [P] . 日本专利： JP2004002961A . 2004-01-08

  机译： 等离子体CVD法的薄膜沉积方法及薄膜沉积系统

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