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SHAPE ACCURACY MEASURING DEVICE BY SEQUENTIAL TWO-POINT METHOD, AND METHOD FOR MEASURING SPACE BETWEEN LASER DISPLACEMENT METER FOR MEASURING SHAPE ACCURACY BY SEQUENTIAL TWO-POINT METHOD
SHAPE ACCURACY MEASURING DEVICE BY SEQUENTIAL TWO-POINT METHOD, AND METHOD FOR MEASURING SPACE BETWEEN LASER DISPLACEMENT METER FOR MEASURING SHAPE ACCURACY BY SEQUENTIAL TWO-POINT METHOD
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机译：序贯两点法测量形状精度的装置及序贯两点法测量形状精度的激光位移计之间的方法
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摘要
PROBLEM TO BE SOLVED: To easily use a laser displacement meter in the measurement by the sequential two-point method.;SOLUTION: This shape accuracy measuring device comprises a displacement meter holding member 3 to arrange two laser displacement meters 4 and 5 with a predetermined space therebetween along the extending direction of the measurement line set with respect to a table 1c, and hold the meters toward the table 1c with substantially equal distance from the table 1c, a machine tool body 1a to relatively move the displacement meter holding member 3 to the table 1c along the measurement line; a CCD 2 to successively detect the position of the laser beam from the laser displacement meters 4 and 5 irradiated on the table 1c according to the relative movement of the displacement meter holding member 3; and a control device 1b which takes in the output signals from the two laser displacement meters 4 and 5 every time the displacement meter holding member 3 is relatively moved by the distance equal to the space between the two laser displacement meters 4 and 5 obtained from the relative movement of the displacement meter holding member 3 until the position of the laser beam from the other laser displacement meter 5 agrees with the position of the laser beam from one laser displacement meter 4 on the table 1c according to the relative movement of the displacement meter holding member 3, and operates the output signals based on the sequential two-point method to obtain the straightness error curve of the table 1c.;COPYRIGHT: (C)2001,JPO
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