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Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
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机译:通过能量反射提高在基板的快速热处理中使用的辐射能源效率的方法和设备
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摘要
A rapid thermal heating system which includes a plurality of radiant energy sources to irradiate a predetermined area of a substrate. The radiant energy sources are associated with reflectors wherein portions of radiated areas of adjacent radiant energy sources overlap. The reflectors include a flared specular surface at their light emitting end or outlet. The flared specular surface reflects radiant energy toward the substrate.
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