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Instrument for detecting charged particles; has high energy particle detector that deflects low energy particles to low energy particle detector using negatively biased casing
Instrument for detecting charged particles; has high energy particle detector that deflects low energy particles to low energy particle detector using negatively biased casing
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机译：检测带电粒子的仪器;具有高能粒子探测器，该探测器使用负偏压外壳将低能粒子偏转到低能粒子探测器
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摘要
The instrument has a detector (22) for high energy particles and a detector (20) for low energy particles. The high energy particle detector deflects low energy particles to the low energy particle detector by using a negatively biased casing. It is further from the specimen (5) than the low energy detector and deflects particles that have passed the low energy detector back to it. An Independent claim is also included for an instrument and a method for detecting high energy charged particles.
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