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Procedure for evacuation of a container in which a plasma discharge it to be set up in a plasma reactor for sterilization of components has a multi-stage pumping process with vacuum pumps efficient over different pressures
Procedure for evacuation of a container in which a plasma discharge it to be set up in a plasma reactor for sterilization of components has a multi-stage pumping process with vacuum pumps efficient over different pressures
Procedure has two or more, but most likely three, sequential evacuation steps so that the reactor container (1) is lowered to a first intermediate pressure in a first step whilst connected to one of three low pressure chambers (26,27,28) and pumped down using one of three pumps (32,33,34). Subsequent second and third steps lower the pressure still further. The pumps are connected in parallel and once a certain pressure is reached the container is connected to the next pump etc.
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