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Micro-system flow sensor comprises a metallic resistive layer which is structured and under-etched to form free-standing temperature sensor and heater structures
Micro-system flow sensor comprises a metallic resistive layer which is structured and under-etched to form free-standing temperature sensor and heater structures
A micro-system flow sensor, comprising a metallic resistive layer which is structured and under-etched to form free-standing temperature sensor and heater structures, is new. A micro-system flow sensor, preferably of silicon-glass or silicon-plastic technology, has a measuring system consisting of a temperature sensor provided on each side of or integrated in a heater, the sensors, heater and associated leads being structured from a metallic resistive layer and being under-etched by an isotropic silicon plasma etching process, which optionally also forms the trench system in the silicon substrate. An Independent claim is also included for gas supplies for the above flow sensor.
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