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TDDB TEST PATTERN AND TDDB TEST METHOD OF DIELECTRIC FILM OF MOS CAPACITOR USING TDDB TEST PATTERN
TDDB TEST PATTERN AND TDDB TEST METHOD OF DIELECTRIC FILM OF MOS CAPACITOR USING TDDB TEST PATTERN
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机译：TDDB测试图和MOS电容器介电膜的TDDB测试图及TDDB测试方法
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摘要
PURPOSE: An apparatus is provided to reduce the time required for test and a cost for measurement and acquire more number of test data for a constant time so that it can increase the precision of the measurement. CONSTITUTION: The apparatus comprises a plurality of unit test pattern cell, a first voltage supply unit, an ampere meter(15), a voltage forcing node, a drain current measuring node and a second voltage supply unit. A plurality of unit test pattern cell comprises a MOS-capacitor, a MOS-transistor and a fuse for controlling the operation of the MOS-capacitor and the MOS-transistor. The first voltage supply unit supplies a stress voltage to MOS-capacitor and MOS-transistor of a plurality of unit test pattern cell at the same time. The ampere meter continuously measures the change of the total drain current of MOS-transistor which is an element of a plurality of unit test pattern cell. The voltage forcing node is located between the first voltage supply unit and the fuse of each unit test pattern cell. The drain current measuring node is located between the ampere meter and the drain of the MOS-transistor of a plurality of unit test pattern cell. The second voltage supply unit supplies the voltage to the drain of the MOS-transistor of a plurality of unit test pattern cell.
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